市場消息指,中國自主研發的深紫外光(DUV)光刻機已進入生產階段,計劃於今年向中
芯國際(00981)、華虹宏力(01347)及長鑫存儲等國內頭部晶圓廠進行首批交付。
長期以來,全球光刻機市場主要由荷蘭供應商ASML(US﹒ASML)壟斷。
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